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Solvay Fluor offers a range of chemicals for high performance etching in electronic devices manufacturing. Our liquids (HF and Ammonium Fluoride solutions) complies with the strongest needs for isotropic wet etching.
Sifren®46, developed with Applied Material, offers the highest performances both in terms of selectivity's and aspect ratios for the most critical dielectric etching processes in nodes below the 0,25µm. Sifren®46 gas already been successfully tested for 65nm nodes.
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Cleaning |
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Ammonium Fluoride, 40 %, 10 ppb Grade (C) |
Ammonium Fluoride, 40 %, 10 ppb Grade (C) |
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Elemental Fluorine F2 (C) |
Elemental Fluor (F2) is used to clean CVD tools from silicon deposition within the chamber, which was caused by the CVD process.
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Hydrofluoric Acid, 49 %, 1 ppb Grade (C) |
Hydrofluoric Acid, 49 %, 1 ppb Grade (C) |
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Hydrofluoric Acid, 49%, 10 ppb Grade (C) |
Hydrofluoric Acid, 49%, 10 ppb Grade (C) |
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Sulphur Hexafluoride SF6 (C)electronic grade 5.0 |
Sulphur Hexafluoride (SF6) is a non-toxic, inert, insulating and cooling gas of high dielectric strength and thermal stability. It is used for electrical engeneering and foundry practice.
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CMP |
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Ammonium Fluoride, 40 %, 10 ppb Grade (CMP) |
Ammonium Fluoride, 40 %, 10 ppb Grade (CMP) |
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Hydrofluoric Acid, 49 %, 1 ppb Grade (CMP) |
Hydrofluoric Acid, 49 %, 1 ppb Grade (CMP) |
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Hydrofluoric Acid, 49%, 10 ppb Grade (CMP) |
Hydrofluoric Acid, 49%, 10 ppb Grade (CMP) |
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Etch Gas |
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Sifren® 46 (E) |
Sifren® 46 (C4F6 or Hexafluorobutadiene) is a fluoro compound with two double bonds in the molecule;produced by Solvay Fluor
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Silicon purifying |
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Ammonium Fluoride, 40 %, 10 ppb Grade (S) |
Ammonium Fluoride, 40 %, 10 ppb Grade (S) |
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Hydrofluoric Acid, 49 %, 1 ppb Grade (S) |
Hydrofluoric Acid, 49 %, 1 ppb Grade (S) |
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Hydrofluoric Acid, 49%, 10 ppb Grade (S) |
Hydrofluoric Acid, 49%, 10 ppb Grade (S) |
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Wafer production |
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Ammonium Fluoride, 40 %, 10 ppb Grade (WAF) |
Ammonium Fluoride, 40 %, 10 ppb Grade (WAF) |
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Hydrofluoric Acid, 49%, 1 ppb Grade (WAF) |
Hydrofluoric Acid, 49%, 1 ppb Grade (WAF) |
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Hydrofluoric Acid, 49%, 10 ppb Grade (WAF) |
Hydrofluoric Acid, 49%, 10 ppb Grade (WAF) |
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Wet Etching |
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Ammonium Fluoride, 40 %, 10 ppb Grade (W) |
Ammonium Fluoride, 40 %, 10 ppb Grade (W)
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Hydrofluoric Acid, 49 %, 1 ppb Grade (W) |
Hydrofluoric Acid, 49 %, 1 ppb Grade (W)
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Hydrofluoric Acid, 49%, 10 ppb Grade (W) |
Hydrofluoric Acid, 49%, 10 ppb Grade (W)
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