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| Hydrofluoric Acid, 49%, 10 ppb Grade (CMP) - Datasheet
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| MAXIMUM LIMIT OF IMPURITIES, PPB |
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| Chloride (Cl) |
1000 ppb
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< 100 ppb
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| Phosphate (PO4) |
400 ppb
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< 100 ppb
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| Sulfate (SO4) and Sulfite (SO3) |
500 ppb
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< 100 ppb
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| Nitrate (NO3) |
1000 ppb
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< 100 ppb
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| Arsenic & Antimony (as As) |
10 ppb
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< 1 ppb
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| Aluminum (Al) |
10 ppb
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< 1 ppb
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| Barium (Ba) |
5 ppb
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< 1 ppb
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| Beryllium (Be) |
5 ppb
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< 1 ppb
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| Bismuth (Bi) |
5 ppb
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< 1 ppb
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| Boron (B) |
10 ppb
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< 1 ppb
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| Cadmium (Cd) |
10 ppb
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< 1 ppb
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| Calcium (Ca) |
10 ppb
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< 2 ppb
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| Chromium (Cr) |
10 ppb
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< 1 ppb
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| Cobalt (Co) |
10 ppb
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< 1 ppb
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| Copper (Cu) |
10 ppb
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< 1 ppb
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| Gallium (Ga) |
10 ppb
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< 1 ppb
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| Germanium (Ge) |
10 ppb
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< 1 ppb
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| Gold (Au) |
5 ppb
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< 1 ppb
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| Iron (Fe) |
10 ppb
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< 3 ppb
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| Lead (Pb) |
10 ppb
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< 1 ppb
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| Lithium (Li) |
5 ppb
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< 1 ppb
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| Magnesium (Mg) |
10 ppb
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< 1 ppb
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| Manganese (Mn) |
10 ppb
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< 2 ppb
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| Molybdenum (Mo) |
10 ppb
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< 1 ppb
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| Nickel (Ni) |
10 ppb
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< 1 ppb
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| Niobium (Nb) |
10 ppb
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< 1 ppb
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| Potassium (K) |
10 ppb
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< 1 ppb
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| Silver (Ag) |
5 ppb
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< 1 ppb
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| Sodium (Na) |
10 ppb
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< 2 ppb
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| Strontium (Sr) |
10 ppb
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< 1 ppb
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| Tantalum (Ta) |
10 ppb
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< 1 ppb
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| Thallium (Tl) |
10 ppb
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< 1 ppb
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| Tin (Sn) |
10 ppb
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< 1 ppb
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| Titanium (Ti) |
10 ppb
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< 1 ppb
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| Vanadium (V) |
10 ppb
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< 1 ppb
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| Zinc (Zn) |
10 ppb
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< 1 ppb
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| Zirconium (Zr) |
10 ppb
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< 1 ppb
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| PARTICLE COUNT |
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| >0.5mm, #/ml max (drums) |
150
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< 50
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