Semicon Europe 2007
Stuttgart Messe Center
Solvay Fluor will present the environmentally safe critical etch gas Sifren®, which is successfully tested in 65 nm node.
Further more the environmental friendly cleaning gas F2 as gas mixtures to clean PECVD chambers from deposited residues.
Sulphur hexafluoride as the commercial advantageous cleaning gas especially for TFT-LCD production and as etching gas for MEMS production.
In addition to these gases Solvay Fluor supplies Hydrofluoric Acid high purity and Ammonium Fluoride electronic grade for the wet cleaning process.
We will be pleased to welcome you to our
Booth 2460 in Hall 3
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