Semicon® China, Shanghai, March, 21st -23rd 2006
Shanghai New International Expo Center
Hall W4, booth 4101
Solvay Fluor will present the environmentally safe critical etchgas Sifren©, which is successfully tested in 65nm node.
Furthermore the environmental friendly cleaning gas elemental Fluorine F2 as gas mixture to purify CVD chambers from deposited residues.
Sulphur hexafluoride SF6 as the commercial advantageous cleaning gas especially for TFT-LCD production.
In addition to these gases Solvay Fluor supplies Hydrofluoric Acid high purity and Ammonium Fluoride electronic grade for the wet cleaning process.
We will be pleased to welcome you to our booth.
Solvay Fluor is a wholly owned subsidiary of Solvay S.A., with 11 locations worldwide. Major acquisitions including Hoechst´s refrigeration business in 1996, Norfluor (Mexico) and Chemtech (USA) in 2000, as well as the effects of the Ausimont acquisition in 2002, were key steps in the development of the Solvay Group´s fluorinated specialities.
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