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Elemental Fluorine (F2) is a great alternative to standard cleaning gas, both of the perfluorocarbon's familiy (Hexafluoroethan C2F6; Octofluoropentan C3F8 ...) and Nitrogen Trifluoride (NF3).
We also offer Sulphur Hexafluoride (SF6), which is particularly performing for cleaning steps in Liquid Christal Display (LCD) manufacture.
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Ammonium Fluoride, 40 %, 10 ppb Grade (C) |
Ammonium Fluoride, 40 %, 10 ppb Grade (C) |
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Carbonyl difluoride COF2 |
Carbonyl difluoride COF2 now available in sample quantities
contact: marcello.riva@solvay.com
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Elemental Fluorine F2 (C) |
Elemental Fluor (F2) is used to clean CVD tools from silicon deposition within the chamber, which was caused by the CVD process.
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Hydrofluoric Acid, 49 %, 1 ppb Grade (C) |
Hydrofluoric Acid, 49 %, 1 ppb Grade (C) |
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Hydrofluoric Acid, 49%, 10 ppb Grade (C) |
Hydrofluoric Acid, 49%, 10 ppb Grade (C) |
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Sulphur Hexafluoride SF6 (C)electronic grade 5.0 |
Sulphur Hexafluoride (SF6) is a non-toxic, inert, insulating and cooling gas of high dielectric strength and thermal stability. It is used for electrical engeneering and foundry practice.
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